SFM6000D-5SLM

SFM6000D-5SLM is a digital mass flow controller. This measures gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/D converter and further signal processing are based on a single chip using CMOS standard processes. Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve.

• 5 – 0.01slm flow range
• Disruptive concept combining plastic body and highly integrated electronics
• Small form factor and low weight
• High accuracy/repeatability (2% / 0.2% of set point)
• Wide control range (500:1), ultra-fast settling time (100ms)
• RS485 and I²C digital interface
• Exchangeable 6mm push-in and down mount connectors
• NIST traceable calibration
• No drift and no re-calibration required in the field
• NIST traceable calibration